Title:
ノルボルナン系含フッ素化合物
Document Type and Number:
Japanese Patent JP4407187
Kind Code:
B2
Inventors:
Takashi Chiba
Akihiro Hayashi
Tsutomu Shimokawa
Akihiro Hayashi
Tsutomu Shimokawa
Application Number:
JP2003275425A
Publication Date:
February 03, 2010
Filing Date:
July 16, 2003
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C07C31/44; G03F7/004; C07C33/44; C07C35/52; G03F7/039; H01L21/027
Domestic Patent References:
| JP2003140345A |
Attorney, Agent or Firm:
Toshiaki Fukuzawa