Title:
ノルボルネン型ポリマー、それらの組成物、およびこのような組成物を用いたリソグラフィープロセス
Document Type and Number:
Japanese Patent JP2013533893
Kind Code:
A
Abstract:
Embodiments in accordance with the present invention provide for non-self imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming top-coat layers for overlying photoresist layers in immersion lithographic process and the process thereof.
Inventors:
Kandanarachich, Pramod
Kazuyoshi Fujita
Stephen Smith
Rose, Larry F
Kazuyoshi Fujita
Stephen Smith
Rose, Larry F
Application Number:
JP2013503824A
Publication Date:
August 29, 2013
Filing Date:
April 05, 2011
Export Citation:
Assignee:
Promelas, LLC
Sumitomo Bakelite Co., Ltd.
Sumitomo Bakelite Co., Ltd.
International Classes:
C08F32/00; C08L45/00; H01L21/027
Domestic Patent References:
| JP2011085919A | 2011-04-28 | |||
| JP2011107170A | 2011-06-02 | |||
| JP2011503004A | 2011-01-27 | |||
| JP2009221394A | 2009-10-01 | |||
| JP2008152103A | 2008-07-03 | |||
| JP2008532067A | 2008-08-14 | |||
| JP2006291177A | 2006-10-26 |
Foreign References:
| US20110065878A1 | 2011-03-17 | |||
| WO2009061723A1 | 2009-05-14 | |||
| US20090239179A1 | 2009-09-24 | |||
| US20080026330A1 | 2008-01-31 | |||
| US20110070543A1 | 2011-03-24 |
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Hiroyuki Tomita
Osamu Hoshino
Takumi Terachi
Yasushi Kobayashi
Hiroyuki Tomita
Osamu Hoshino
Takumi Terachi