Title:
NOXIOUS GAS CLEANING AGENT
Document Type and Number:
Japanese Patent JPH07284631
Kind Code:
A
Abstract:
PURPOSE: To obtain a cleaning agent capable of efficiently removing diborane and silanes such as monosilane, disilane, chlorosilane, dichlorosilane and trichlorosilane as gaseous hydrides contained in waste gas discharged from a process for producing a semiconductor.
CONSTITUTION: A binder is added to a compsn. based on strontium hydroxide and triiron tetroxide, preferably a compsn. prepd. by adding water to the compsn. and a molded body is formed to obtain the objective cleaning agent.
Inventors:
KITAHARA KOICHI
OTSUKA KENJI
SHIMADA TAKASHI
HATAKEYAMA TOSHIYA
FUKUDA HIDEKI
OTSUKA KENJI
SHIMADA TAKASHI
HATAKEYAMA TOSHIYA
FUKUDA HIDEKI
Application Number:
JP10169194A
Publication Date:
October 31, 1995
Filing Date:
April 18, 1994
Export Citation:
Assignee:
JAPAN PIONICS
International Classes:
B01D53/34; B01D53/46; (IPC1-7): B01D53/46; B01D53/34