To provide a film deposition apparatus in which the grain size distribution, particle velocity or particle concentration of an aerosol flow in an aerosol deposition method can be exactly measured by using a laser, and a film deposition method.

The nozzle for jetting the aerosol used in the aerosol deposition method includes an aerosol introducing opening, an aerosol exit opening, and an aerosol flow passage for passing the aerosol from the introducing opening to the exit opening. An inner peripheral wall surface delineating the aerosol flow passage is provided with a laser exit surface and a laser photodetecting surface. The laser exit surface is a surface to emit the laser of a laser irradiation apparatus, from which surface the laser is emitted into the aerosol flow passage. The laser photodetecting surface is the photodetecting surface of a sensor detecting the physical quantity of the laser and receives the laser emitted from the laser exit surface.