Title:
ノズル位置補正機構およびそれを備える塗布装置
Document Type and Number:
Japanese Patent JP5187895
Kind Code:
B2
Inventors:
Kazumasa Ikushima
Application Number:
JP2008199064A
Publication Date:
April 24, 2013
Filing Date:
July 31, 2008
Export Citation:
Assignee:
Musashi Engineering Co., Ltd.
International Classes:
B05C5/00; B05B15/68; B05C11/00
Domestic Patent References:
| JP62024976U | ||||
| JP10144708A | ||||
| JP9155273A | ||||
| JP2006314859A | ||||
| JP2002283263A |
Attorney, Agent or Firm:
Asako Sudo
Akinobu Sudo
Akinobu Sudo