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Title:
ORIENTATION-CONTROLLED HIGH LUBRICITY TiN HARD FILM MATERIAL
Document Type and Number:
Japanese Patent JP2005272997
Kind Code:
A
Abstract:

To provide a TiN hard film material in which orientation is controlled to (111) and having high lubricity on the surface of a base material such as special steel, tool steel, alloy steel and carbon steel for energy saving corresponding to the environment.

Coating is performed in such a manner that bias voltage is changed from the conventional -50 to -200 V using a surface modification device such as a PVD ion plating, thus a TiN hard film in which (111) orientation is made predominate from the conventional (200) orientation is obtained. At the time when an intermediate layer such as Ti is inserted into the space between the base material and the TiN hard film, the (111) orientation control effectively occurs.


Inventors:
SHODOSHIMA AKIRA
Application Number:
JP2004123504A
Publication Date:
October 06, 2005
Filing Date:
March 24, 2004
Export Citation:
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Assignee:
SHODOSHIMA AKIRA
International Classes:
C10M103/06; C23C14/06; C10N10/08; C10N30/06; C10N40/02; C10N70/00; (IPC1-7): C23C14/06; C10M103/06