To simultaneously observe an aspect of an inspection object surface and to calculate difference of elevation in the inspection object surface.
A light emission part 9 emits light L0 whose cross-sectional shape has a two-dimensional extent. Edges of the cross-sectional shape are shaped into difference of elevation measuring edges of a line segment shape while maintaining the two-dimensional extent of the cross-sectional shape of the emitted light. Shaped light L1 is irradiated to an inspection object surface 1. An area including the irradiation range of the light L1 in the inspection object surface 1 is imaged by an imaging device 5 to generate an image. An aspect of the inspection object surface 1 is observed from the irradiation range of light expanding in a two-dimensional manner in the generated image. In the generated image, an amount in which the difference of elevation measuring edges of the light L1 are deformed from a line segment shape is calculated, and the difference of elevation of the inspection object surface 1 is calculated on the basis of the amount.
MORITA MASARU
NITTA NORIO
NIPPON STEEL & SUMITOMO METAL CORP
| JP2004077019A | 2004-03-11 | |||
| JPS57108705A | 1982-07-06 | |||
| JPH09159966A | 1997-06-20 |
Toshihiro Nomura