OBJECTIVE LENS - ZEISS CARL SEMICONDUCTOR MFG

Title:

OBJECTIVE LENS

Document Type and Number:

Japanese Patent JP2002333579

Kind Code:

A

Abstract:

To provide a cata-dioptric objective lens where deflection mirrors are mutually adjusted and supported accurately, and simultaneously to which high rigidity is given.

The cata-dioptric objective lens has at least two deflection mirrors 2 and 3 equipped with a plurality of reflection surfaces 2a and 3a positioned at a specified angle, especially, at 90° to each other and a plurality of lenses. The deflection mirrors are disposed so that their reflection surfaces may be positioned on a common base member 1 whose position is set in the objective lens.

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Inventors:

HOLDERER HUBERT
WEBER ULRICH
KOHL ALEXANDER
GRUNER TORALF
ZACZEK CHRISTOF
ULLMANN JENS
WEISER MARTIN
GELLRICH BERNHARD
MUENKER HARTMUT

Application Number:

JP2002109097A

Publication Date:

November 22, 2002

Filing Date:

April 11, 2002

Export Citation:

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Assignee:

ZEISS CARL SEMICONDUCTOR MFG

International Classes:

G02B17/08; G03F7/20; H01L21/027; (IPC1-7): G02B17/08; H01L21/027

Attorney, Agent or Firm:

Takehiko Suzue (3 outside)

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