Title:
多極子レンズの製造方法及び多極子レンズ並びに多極子レンズを備えた観察装置
Document Type and Number:
Japanese Patent JP4133508
Kind Code:
B2
Abstract:
A method of efficiently fabricating a multipole lens using a simple procedure is offered. The multipole lens has plural polar elements (23) and an annular holding member (25). Each polar element has a held portion (22). The annular holding member is provided with through-holes (25a) for holding the held portions of the polar elements. A resin (24) is injected into the through-holes in the holding member via openings (32) formed in the holding member, the openings being in communication with the through-holes. The injected resin is cured, thus holding the held portions of the polar elements to the holding member within the through-holes. The invention also extends to the multipole lens so fabricated, and to a charged-particle beam instrument comprising the multipole lens.
Inventors:
Kawai Eiji
Application Number:
JP2003090279A
Publication Date:
August 13, 2008
Filing Date:
March 28, 2003
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J3/22; H01J37/141; H01J9/14; H01J9/236; H01J37/10
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