To properly and efficiently set an observation region.
In a visual inspection device to visually unspect, an image pick-up region and an observation magnification are set in advance for each part type and are stored in a memory 23 as library data. The memory 23 stores CAD data for keeping the part type and position data of each part on a substrate to be inspected and a control part 22 connects the position data of each part obtained from the CAD data to corresponding library data and fixes visual field region and observation magnification in each part on the substrate. Further, the control part 22 sets a plurality of observation regions on the substrate for each observation magnification using the fixed data and stores the setting information in the memory 23. At the time of inspection, the control part 22 controls the position and magnification of the image pick-up part 2 using the setting information of each observation region and successively reads the image data within each observation region and displays them on a monitor 6.
YAMAMOTO NORIHITO
SAWANOI YUKIYA
