To reduce moving quantity of a sample stage so as to efficiently observe a defect in a short time by indicating an image provided by picking up image of a desired area of a sample on a first screen, magnifying and picking up the image while designating an area including a defect in the image, and providing an expanded image of the defect.
A sample on a sample stage is arranged on the basis of defect information previously provided by means of a surface inspection device, and its image is picked up by means of a scanning electron microscope. Firstly, an area including no defect is picked up, and a reference image 8 based on a first magnification is provided. Secondarily, the stage is moved and an area including a defect is picked up at the same magnification as the reference image 8, and then, a first defect image 9 is provided. Position matching between the reference image 8 and the defect image 9 is carried out by means of a template matching and the like, a difference area between both images is detected, and a defect position 10 in the defect image 9 is set. Subsequently, a designated vision area 12 including the defect position 10 is picked up at expanding magnification, and a magnified second defect image 11 is provided. Consequently, a condition of the defect can be surely observed in detail.
TAKAGI YUJI
SHIMODA ATSUSHI
NAKAGAKI AKIRA
ISOGAI SHIZUSHI
OZAWA YASUHIKO
BABA HIDEHARU
WATANABE KENJI
SHISHIDO CHIE
| JPH09139406A | 1997-05-27 | |||
| JPS6151658U | 1986-04-07 | |||
| JPH05290786A | 1993-11-05 | |||
| JPH02170279A | 1990-07-02 | |||
| JPH08180826A | 1996-07-12 | |||
| JPH08203464A | 1996-08-09 | |||
| JPS643949A | 1989-01-09 | |||
| JPH0479140A | 1992-03-12 | |||
| JPH09259807A | 1997-10-03 | |||
| JPH103875A | 1998-01-06 |