Title:
観察支援ユニットおよびこれを用いた試料観察方法、荷電粒子線装置
Document Type and Number:
Japanese Patent JP6522133
Kind Code:
B2
Abstract:
In order to observe a water-containing sample with excellent convenience under an air atmosphere or a gas atmosphere, or under a desired pressure, in the present invention, there is provided an observation support unit for observation by irradiating the sample disposed in a non-vacuum space separated by a diaphragm from an inner space of a charged particle optical lens barrel that generates a charged particle beam, with the charged particle beam. The observation support unit includes a main body portion for covering a hole portion that forms an observation region where the sample is observed, and the sample, and the observation support unit is directly mounted between the sample and the diaphragm, that is, on the sample.
Inventors:
Onan Yusuke
Akiko Hisada
Akiko Hisada
Application Number:
JP2017536064A
Publication Date:
May 29, 2019
Filing Date:
August 21, 2015
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/20; G01N1/28; H01J37/18; H01J37/28
Foreign References:
| WO2010092747A1 | ||||
| WO2015053020A1 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation