Title:
ODOR SENSOR
Document Type and Number:
Japanese Patent JPH05296907
Kind Code:
A
Abstract:
PURPOSE: To provide an odor sensor having excellent sensitivity and a high speed of response.
CONSTITUTION: The sensor is provided with a crystal unit composed of a quartz plate 1 and metallic electrodes 2 formed on both surfaces of the plate 1, numerous columnar or drill-like metallic or nonmetallic projections 4 formed on the surface of the electrode 2 on one side of the unit or those on both sides of the unit, and thin odor sensitive films 3 formed on the surfaces of the projections 4 and electrodes 2.
Inventors:
MATSUNO GEN
Application Number:
JP9787892A
Publication Date:
November 12, 1993
Filing Date:
April 17, 1992
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01N5/02; G01N9/00; (IPC1-7): G01N9/00; G01N5/02
Attorney, Agent or Firm:
Shinsuke Ozawa