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Title:
炭素元素円筒型構造体へのオーミック接続構造及びその作製方法
Document Type and Number:
Japanese Patent JP4401094
Kind Code:
B2
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Inventors:
Nihei Mizuhisa
Application Number:
JP2003078353A
Publication Date:
January 20, 2010
Filing Date:
March 20, 2003
Export Citation:
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Assignee:
富士通株式会社
International Classes:
B82B1/00; H01L21/768; B82B3/00; C01B31/02; C23C16/26; H01L21/285; H01L21/3205; H01L23/52; H01L23/522
Domestic Patent References:
JP2002329723A
JP2003077923A
JP11194134A
JP2001236879A
JP2002285334A
JP11349306A
JP2000141056A
Other References:
Y.Zhang, T.Ichihashi, E.Landree, F.Nihey, S.Iijima,Heterostructures of Single-Walled Carbon Nanotubes and Carbide Nanorods ,Science,1999年 9月10日,Vol.285, No.5434,pp. 1719 - 1722
Attorney, Agent or Firm:
Atsushi Aoki
Koichi Itsubo
Higuchi Souji
Masami Enohara
Kurachi Yasuyuki
Ryu Kobayashi



 
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