Title:
OIL-FREE VACUUM PUMP
Document Type and Number:
Japanese Patent JPH0571471
Kind Code:
A
Abstract:
PURPOSE: To provide an oil-free vacuum pump having high speed and high pumping speed, and high ultimate vacuum.
CONSTITUTION: When a piston 12 moves right, solenoid valves 16 and 19 opens, and other solenoid valves 17 and 18 close. As a result, gas is sucked through the valve 16, and discharged through the valve 19. When the piston 12 moves left, the valves 16 and 19 close, and the valves 17 and 18 open. As a result, the gas is shifted from the left side of the piston 12 to the right side thereof. These processes are repeated, thereby gradually generating vacuum in an intake pipe 21.
Inventors:
OKUYAMA NOBUHISA
HIROTA MASAYOSHI
HIROTA MASAYOSHI
Application Number:
JP23188391A
Publication Date:
March 23, 1993
Filing Date:
September 11, 1991
Export Citation:
Assignee:
TOYO ENGINEERING CORP
International Classes:
F04B37/16; F04B39/10; (IPC1-7): F04B37/16; F04B39/10
Attorney, Agent or Firm:
Wakabayashi Tadashi
Next Patent: GAS COMPRESSOR