Title:
OIL-FREE VACUUM PUMP
Document Type and Number:
Japanese Patent JPS62121887
Kind Code:
A
Abstract:
PURPOSE: To obtain a vacuum pump having good durability and corrosion resistance by employing such material as produced by mixing/dispersing ceramics into a polyimid resin then thermally molding at the portion of an oil-free vacuum pump contactable with gas.
CONSTITUTION: Such material as produced by mixing/dispersing ceramics into a polyimid resin and thermally molding is employed for the rotor vanes 22, 23 of a Roots vacuum pump 21. The ceramics will include a silicon carbide, a silicon nitride, etc. and when adding the ceramics, the abrasion resistance of material can be improved considerably. Since the polyimid resin has a high resistance against a corrosive gas, the durability of Roots pump itself can be improved considerably.
Inventors:
ARAKAWA YOSHIKI
MOCHIZUKI TAKETOSHI
TOMOSAWA AKIRA
MOCHIZUKI TAKETOSHI
TOMOSAWA AKIRA
Application Number:
JP26327885A
Publication Date:
June 03, 1987
Filing Date:
November 22, 1985
Export Citation:
Assignee:
SHIN MEIWA IND CO LTD
International Classes:
F04B37/14; F01C1/08; F04C18/12; F04C25/02; F04C29/00; (IPC1-7): F04B37/14; F04C25/02; F04C29/00