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Title:
オイルポンプを備えたオイルシール式回転ベーン真空ポンプ
Document Type and Number:
Japanese Patent JP3946254
Kind Code:
B2
Abstract:
PCT No. PCT/EP96/03077 Sec. 371 Date Jan. 14, 1998 Sec. 102(e) Date Jan. 14, 1998 PCT Filed Jul. 12, 1996 PCT Pub. No. WO97/04235 PCT Pub. Date Feb. 6, 1997The invention concerns an oil-sealed vane-type rotary vacuum pump (1) with a rotor (3) and an oil pump (45, 46) whose suction chamber is fitted with feeds (64, 65) for gas and oil. In order to simplify the supply of a gas/oil mixture to the vacuum pump, the invention proposes that the gas and oil feeds (64, 65) are disposed in such a way that initially only oil and subsequently both oil and air are aspirated into the volume swept by the oil pump (45, 46) as it rotates.

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Inventors:
Thomas Abelen
Peter Muller
Application Number:
JP50626897A
Publication Date:
July 18, 2007
Filing Date:
July 12, 1996
Export Citation:
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Assignee:
Leybold Vakuum GmbH
International Classes:
F04C25/02; F04B19/06; F04C2/356; F04C15/06; F04C29/00; F04C29/02
Domestic Patent References:
JP45020468B1
JP53123503U
JP5001687A
JP9500942A
Foreign References:
DE3922417A1
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Reinhard Einsel