To provide an oil tightness inspection apparatus which surely sets a workpiece in the inspection apparatus even when there is variation in workpiece ends, and also to provide accurate quality determination.
The oil tightness inspection apparatus is provided with a measurement section 3 having an inspection section 4 on which a workpiece W under inspection is mounted and a measurement head 5 for measuring the amount of oil leakage of the workpiece W. A movable section 6 is provided above the measurement section 3 in a vertically movable manner. An oil supply section 7, a clamp section 8 for holding the oil supply section 7, a workpiece holding section 9 for holding the workpiece W, and a first drive section 10 for allowing the oil supply section 7 to be coupled to the workpiece W are installed in the movable section 6. The movable section 6 is connected through a second drive section 11 installed on a top section 2b of an inspection base 2 and a compliance unit 12 for absorbing variation in workpiece W ends and variation in hold status.
Jun Tsuruta
Tetsuro Shimada
Shinozaki Masami
Tanimitsu Masaharu
Shigeru Takebayashi