Title:
ONIUM COMPOUND AND SYNTHESIZING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2014097969
Kind Code:
A
Abstract:
To provide a novel onium salt compound useful as an acid generator component of a photoresist composition and a method for synthesizing such a compound.
A desired novel onium salt compound is prepared, for example, by treating 10-(5-((2-(1-ethylcyclopentyloxy)-2-oxoethoxy)carbonyl)-2-methoxyphenyl)-9-oxo-2-(trifluoromethyl)-4,4a,9,10-tetrahydrothioxanthylium trifluoromethanesulfonate with sodium iodide to form an iodide salt represented by the following formula and then followed by treating with sodium 3-hydroxyadamantane-acetoxy-1,1,2,2-tetrafluorobutane-1-sulfonate.
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Inventors:
LABEAUME PAUL J
Application Number:
JP2013190009A
Publication Date:
May 29, 2014
Filing Date:
September 13, 2013
Export Citation:
Assignee:
ROHM & HAAS ELECT MAT
International Classes:
C07C303/32; C07C309/12; C07D335/16; G03F7/004
Domestic Patent References:
| JP2010044253A | 2010-02-25 | |||
| JP2001183832A | 2001-07-06 | |||
| JP2012027290A | 2012-02-09 | |||
| JP2009221195A | 2009-10-01 |
Foreign References:
| WO2012131286A1 | 2012-10-04 | |||
| WO2009136482A1 | 2009-11-12 | |||
| WO2003074509A1 | 2003-09-12 | |||
| WO2011070947A1 | 2011-06-16 |
Other References:
JPN6014038470; Ｒｏｂｅｒｔ Ｊ． Ａｎｇｅｌｉｃｉ， ｅｔ ａｌ．: 'Ｍｏｎｏ- ａｎｄ ｄｉｎｕｃｌｅａｒ ｔｈｉｏｃａｒｂｏｎｙｌ ｃｏｍｐｌｅｘｅｓ ｏｆ ｉｒｏｎ， ｉｎｃｌｕｄｉｎｇ ［ＣｐＦｅ（ＣＯ）（ＣＳ）］２， ＣｐＦｅ（ＣＯ）（ＣＳ）Ｉ， ａｎｄ Ｃｐ' Ｉｎｏｒｇａｎｉｃ Ｃｈｅｍｉｓｔｒｙ ｖｏｌ．２４ ｎｏ．１４, 1985, ｐ．２２０９-２２１５
Attorney, Agent or Firm:
Patent Business Corporation Sender International Patent Office
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