OPERATING DEVICE - KOGYO GIJUTSU INCHO

Title:

OPERATING DEVICE

Document Type and Number:

Japanese Patent JP2631332

Kind Code:

B2

Abstract:

PURPOSE: To stabilize the movement of fixing units by connecting expanding/shrinking means and fixing means having attraction sections switching magnetic objects to the attractable state or the unattractable state with connecting means rockable in the perpendicular direction to the expanding/shrinking direction.
CONSTITUTION: An expanding/shrinking device 12 is constituted of a pair of expanding/ shrinking units 18 provided with elements expanded or shrunk by the electric force or magnetic force such as the magnetic field, fixing units 20, 22 having magnetic attracting/fixing devices 28 at bottom sections, and a pair of joints 24, 26 connecting the expanding/shrinking units 18 and the fixing units 20, 22. The fixing units 20, 22 have magnetic attraction sections 28 switching magnetic objects to the attractable state or the unattractable state. The fixing units 20, 22 are connected to the expanding/shrinking units 18 rockably in the vertical direction centering on the center sections of plate sections 30. When the expanding/shrinking units 18 are expanded (shrunk) while the attraction section 28 of the fixing unit 20 is set to the attractable state and the attraction section 28 of the fixing unit 22 is set to the unattractable state, for example, the fixing unit 22 is moved in the separating (approaching) direction from the fixing unit 20. If the fixing units 20, 22 are connected to the units 18 rockably in the vertical direction, the attraction sections 28 are brought into contact with a shift reference section invariably at the correct state, and movement of the fixing units 20, 22 is stabilized.

Inventors:

TANAKA MITSURU
NAKAYAMA KAN
YOKOYAMA KOJI
ITO YOSHUKI

Application Number:

JP27479992A

Publication Date:

July 16, 1997

Filing Date:

September 21, 1992

Export Citation:

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Assignee:

KOGYO GIJUTSU INCHO
KANETETSUKU KK

International Classes:

G12B5/00; B23Q5/22; H01L21/68; H01L41/09; (IPC1-7): G12B5/00; B23Q5/22; H01L21/68; H01L41/09

Domestic Patent References:

JP63238416A

Attorney, Agent or Firm:

Director, Institute of Metrology, AIST (1 outside)
Matsunaga Nobuyuki

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