Title:
超純水製造装置及び超純水製造装置の運転方法
Document Type and Number:
Japanese Patent JP6848415
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an ultrapure water producing apparatus having an ultraviolet oxidizing device and a platinum group metal catalyst resin tower in a subsystem and suppressing reduction in hydrogen peroxide removing ability.SOLUTION: A primary pure water producing apparatus 3 includes a tank 5, an ultraviolet oxidizing device 6, a regenerative ion exchanging device 7, and a membrane type degassing device 8. The subsystem 4 includes a sub tank 11, an ultraviolet oxidizing device 12 for processing primary pure water supplied from the sub tank 11, a hydrogen gas supply means 13, a platinum group metal catalyst resin tower 14, a membrane type degassing device 15, a non-regenerative mixed bed ion exchanger 16 and an ultrafiltration (UF) membrane 17. The platinum group metal catalyst resin in the platinum group metal catalyst resin tower 14 is obtained by supporting a platinum group metal on a support resin: particularly the support resin having nano-order particles of a platinum group metal supported thereon is preferable.SELECTED DRAWING: Figure 1
Inventors:
Yasuharu Minato
Takaaki Nakama
Takaaki Nakama
Application Number:
JP2016244472A
Publication Date:
March 24, 2021
Filing Date:
December 16, 2016
Export Citation:
Assignee:
Kurita Water Industries Ltd.
International Classes:
B01D19/00; C02F1/70; B01J31/08; C02F1/32; C02F1/42; C02F1/72; C02F9/02; C02F9/06; C02F9/12
Domestic Patent References:
| JP2010240641A | ||||
| JP2007528781A | ||||
| JP2007185587A | ||||
| JP2007125519A | ||||
| JP6039379A |
Foreign References:
| WO2009122884A1 |
Attorney, Agent or Firm:
Yuji Hayakawa
Keisuke Murasame
Keisuke Murasame