Title:
光学MEMS素子とその製造方法、並びに回折型光学MEMS素子
Document Type and Number:
Japanese Patent JP4366961
Kind Code:
B2
Inventors:
Hiroto Kasai
Application Number:
JP2003047873A
Publication Date:
November 18, 2009
Filing Date:
February 25, 2003
Export Citation:
Assignee:
ソニー株式会社
International Classes:
G02B26/08; B81B3/00; B81C1/00
Domestic Patent References:
| JP2000131630A | ||||
| JP2002258174A | ||||
| JP2002341269A | ||||
| JP2002026007A | ||||
| JP8114408A | ||||
| JP2001518198A |
Attorney, Agent or Firm:
Yoshitsuno Kakuda