光角度変調測定装置及び測定方法

Japanese Patent JP7239975

B2

The present invention provides an apparatus and a method which enable, in optical angle modulation measurement of laser light to be measured by a delayed self-heterodyne method, accurate measurement of a temporal waveform of optical angle modulation, without any influence by light intensity modulation, without necessity of calibration, and without necessity of stabilizing an interferometer. In an optical angle modulation measurement apparatus by a delayed self-heterodyne method, a heterodyne interferometer that is fed with laser light to be measured; a photodetector that receives output light of the heterodyne interferometer and performs heterodyne detection of the output light to output a beat signal; a phase demodulator that is configured to demodulates a phase of a beat signal; and a temporal waveform analyzer that is configured to obtain a temporal waveform of optical angle modulation, from the phase of the beat signal are provided. In an optical angle modulation measurement method by a delayed self-heterodyne method, laser light to be measured which is optical-angle modulated is input to a heterodyne interferometer, heterodyne detection of the output light is performed by a photodetector, and a temporal waveform of optical angle modulation is obtained by demodulating a phase of the beat signal.

Tsuchida Hidemi

JP2018545032A

March 15, 2023

October 11, 2017

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National Institute of Advanced Industrial Science and Technology

G01J9/04; G01B9/02; G01J9/02

JP6221808A
JP2003149083A
JP942976A
JP4339212A
JP201288174A
JP2011214921A
JP2008175746A

WO2016150783A1

Kazuzumi Nishizawa
Makiko Otsuki
Kazunori Onami

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