Title:
OPTICAL AXIS ADJUSTING EQUIPMENT FOR ASPHERICAL MIRROR
Document Type and Number:
Japanese Patent JP3437722
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an optical axis adjusting equipment for an aspherical mirror wherein optical axis adjustment of high precision is enabled to various kinds of aspherical mirrors by using a simple equipment.
SOLUTION: This light axis adjusting equipment consists of the following; a light source part 50, an objective 60 which once converges the casted light from the light source part 50, disperses it and makes it enter an off-axis parabolic mirror 10 as a mirror to be adjusted, a plane mirror 70 which reverses a luminous flux which is dispersed via the objective 60 and reflected by the off-axis parabolic mirror 10 in a backward luminous flux traveling in the reverse direction and introduces it to the off-axis parabolic mirror 10 again, and an observation optical system 80 which can observe, via the objective 60, the condition of a converged spot CS wherein the backward luminous flux which is reflected by the plane mirror 70, and further reflected by the off-axis parabolic mirror 10 is converged again by the off-axis parabolic mirror 10. When the arrangement of the off-axis parabolic mirror 10 is so slightly adjusted that the converged spot CS is minimized, the optical axis OA of an inspection equipment 100 side is made to coincide with the optical axis of the off-axis parabolic mirror 10, and arrangement adjustment of the off-axis parabolic mirror 10 is completed.
Inventors:
Masahide Okazaki
Application Number:
JP26595696A
Publication Date:
August 18, 2003
Filing Date:
October 07, 1996
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G01M11/02; G01M11/04; G02B7/00; G02B7/198; G02B17/08; (IPC1-7): G01M11/02; G01M11/04; G02B7/00; G02B7/198; G02B17/08
Domestic Patent References:
| JP5312671A | ||||
| JP1048409A |
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)