Title:
荷電粒子線の光軸調整方法、及び荷電粒子線装置
Document Type and Number:
Japanese Patent JP5178558
Kind Code:
B2
Abstract:
Provided are a method for adjusting the optical axis of a charged particle beam and a device therefor, wherein an artificial criterion is quantified, and whether or not the adjustment of the axis of a charged particle beam is necessary is judged on the basis of the quantified criterion. In the method for adjusting the optical axis and the device therefor, the conditions for adjusting an optical element for adjusting a charged particle beam are changed; a plurality of images are captured under the changed conditions; images the qualities of which are allowed or images the qualities of which are not allowed are selected from the captured images; a first image quality evaluation value is obtained on the basis of the selected images; the obtained first image quality evaluation value is compared with a second image quality evaluation value obtained from images obtained by scanning an object using the charged particle beam; and the optical axis is adjusted when the second image quality evaluation value is equal to or below the first image quality evaluation value.
Inventors:
Akemi Kono
Osamu Nasu
Osamu Nasu
Application Number:
JP2009022102A
Publication Date:
April 10, 2013
Filing Date:
February 03, 2009
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/22; G21K5/04; H01J37/04
Domestic Patent References:
| JP2003346690A | ||||
| JP2007207763A |
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Yuji Toda