Title:
OPTICAL CHARACTERISTIC MEASUREMENT APPARATUS
Document Type and Number:
Japanese Patent JP2009133735
Kind Code:
A
Abstract:
To provide an optical characteristic measurement apparatus for easily expanding its dynamic range when a light from a light emitting element is spectroscopically measured.
A control means determines the quantity of a measurement light entering into a light receiving section based on a detection output from the light receiving section 26. If the quantity of the light entering into the light receiving section 26 is smaller than a predetermined lower limit, a fading rate in an optical filter section 22 is switched to a smaller value. If the quantity of the light entering into the light receiving section 26 is larger than a predetermined upper limit, the fading rate in the optical filter section 22 is switched to a larger value.
Inventors:
NAGASHIMA TAKU
MIZUGUCHI TSUTOMU
OSHIMA HIROMASA
MIZUGUCHI TSUTOMU
OSHIMA HIROMASA
Application Number:
JP2007310395A
Publication Date:
June 18, 2009
Filing Date:
November 30, 2007
Export Citation:
Assignee:
OTSUKA DENSHI CO LTD
International Classes:
G01J1/42; G01J3/50; G01M11/00; H01L33/00
Domestic Patent References:
| JP2002195882A | 2002-07-10 | |||
| JPH05256702A | 1993-10-05 | |||
| JPH06281499A | 1994-10-07 | |||
| JP2007078502A | 2007-03-29 | |||
| JPH11133211A | 1999-05-21 | |||
| JP2007506974A | 2007-03-22 | |||
| JP2002195882A | 2002-07-10 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa