Title:
光学特性測定ユニット
Document Type and Number:
Japanese Patent JP4168543
Kind Code:
B2
Abstract:
A unit for measuring optical properties. The unit includes the first through sixth reflecting surfaces, a reflecting surface rotating device and an object moving device. In order to accurately measure transmittance, reflectance and phase change in transmittance or reflection of optical elements, especially transmittance of a thick object, the first through the fourth reflecting surfaces M1-M4 are arranged so that an optical path formed by the reflecting surfaces M1-M4 has a shape like an "N" letter and so that light of incidence L1 has the same optical axis as exit light L2. An optical center O is a point that a line segment that connects a point of incidence A with an exit point D intersects an optical path that connects the reflecting surface M2 with the reflecting surface M3. The reflecting surface M2 is an ellipsoid of revolution having foci of the optical center O and the point of incidence A. The reflecting surface M3 is an ellipsoid of revolution having foci of the optical center and the exit point D. A reflecting surface rotating device rotates M4 at the exit point D in conjunction with the reflecting surface M1 that is rotated at the point of incidence A. The reflecting surface M5 is a parabolic mirror that makes light reflected from the reflecting surface M1 parallel. M6 is a parabolic mirror that converges light reflected from the reflecting surface M5 onto the reflecting mirror M4.
Inventors:
Hiroshi Niikura
Application Number:
JP22976399A
Publication Date:
October 22, 2008
Filing Date:
August 16, 1999
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01N21/01; G01N21/21; G01N21/27; G01N21/41; G01N21/59
Domestic Patent References:
| JP5264353A | ||||
| JP11183320A | ||||
| JP5079948A | ||||
| JP2000035363A |
Attorney, Agent or Firm:
Takashi Ogaki