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Title:
Optical component
Document Type and Number:
Japanese Patent JP6207530
Kind Code:
B2
Abstract:
An optical component comprising a mirror array having a multiplicity of mirror elements, which each have at least one degree of freedom of displacement, and which are each connected to at least one actuator for displacement, has a multiplicity of local regulating devices for damping oscillations of the mirror elements, wherein each of the regulating devices in each case has at least one capacitive sensor having at least one moveable electrode and at least one electrode arranged rigidly relative to the carrying structure.

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Inventors:
Zeverin Valdis
Marco Jazzman
Kuggler Ataman
Roger Mark Bostock
Jen Darung
Sebastian Lani
Benedict Nauf
Application Number:
JP2014557031A
Publication Date:
October 04, 2017
Filing Date:
February 14, 2013
Export Citation:
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Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B7/198; G02B19/00
Domestic Patent References:
JP2009075557A
JP2005099682A
JP2015515116A
JP2009111369A
JP2011180528A
JP2010518595A
Foreign References:
WO2010049076A2
US20030174376
Attorney, Agent or Firm:
Kenji Sugimura
Groundwork Kenichi
Yamato Okano



 
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