To provide an optical deflector array having a structure suitable for high integration.
An optical deflector array 200 is constituted of an optical deflector array board 210, a wiring board 220 and a magnetic array 250. The optical deflector array board 210 has a plurality of movable plate units 110, each of which is provided with eight electrode pads 214. The wiring board 220 has a plurality of connecting electrode pads 222, electrode pads 224 of the same number with the pads 222 provided near the edges of the connecting electrode pads 222, and wiring 226 electrically connecting the connecting electrode pads 222 with the pads 224 respectively. Each of the connecting electrode pads 222 is formed at a position facing the electrode pads 214 of the optical deflector array board 210. The optical deflector array board 210 and the wiring board 220 are jointed to each other via a bump. The bump electrically connects the electrode pads 214 and the connecting electrode pads 222.
| WO/2001/033258 | REAL TIME MILLIMETER WAVE SCANNING IMAGER |
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KAMIYA NOBUTAKA
MIYAJIMA HIROSHI
NISHIO MASAHIRO
Satoshi Kono
Sadao Muramatsu
Tetsuya Kazama