Title:
Optical deflector
Document Type and Number:
Japanese Patent JP5989982
Kind Code:
B2
Abstract:
In an optical deflector apparatus, an optical deflector chip (10A, 10B) includes a mirror (11, 11' ), an actuator (141, 142, 161, 162) adapted to rock the mirror, and first pads (18) on a front surface of the optical deflector chip and connected to the actuator. A first substrate (20A, 20B) includes second pads (22) on a back surface of the first substrate, and an opening (20a) is formed in the first substrate. The front surface of the optical deflector chip is adhered to the back surface of the first substrate in such a way that the first pads of the optical deflector chip are in contact with respective ones of the second pads of the first substrate and the mirror opposes the opening. A back surface of said optical deflector chip is adhered to a front surface of a second substrate (30A, 30B).
Inventors:
Yoshiaki Yasuda
Application Number:
JP2011215621A
Publication Date:
September 07, 2016
Filing Date:
September 29, 2011
Export Citation:
Assignee:
Stanley Electric Co., Ltd.
International Classes:
G02B26/10; B81B3/00; G02B26/08
Domestic Patent References:
| JP2005266566A | ||||
| JP2008020505A | ||||
| JP2010008613A | ||||
| JP2011186124A | ||||
| JP2002139691A |
Foreign References:
| US20060023284 |
Attorney, Agent or Firm:
Creation International Patent Office
Previous Patent: A factory line and a board inspection method
Next Patent: HOT HYDROSTATIC PRESSURE PRESS DEVICE
Next Patent: HOT HYDROSTATIC PRESSURE PRESS DEVICE