To provide a connection device which achieves high imaging quality of a micro lithography device.
A plurality of connection units for connecting a support section of an optical module to a support structure are designed to give a supporting force to the support section in a predefined position of the support structure. The support section has a predefined desired geometrical shape while being supported by the support structure. At least one connection unit has at least one elastic element and generates a tuning supporting force in the state where the optical module is supported. The tuning supporting force is tuned to the supporting force of other remaining connection units by the at least one elastic element, such that a maximum positional displacement induced by deforming a point of the support section becomes preferably less than 100 nm or further preferably less than 10 nm or, in addition to or in place of this, such that a maximum angular displacement in the point of the support section becomes preferably less than 5 mrad or further preferably less than 2 mrad.
MARKUS KERN
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Yamaguchi Yusuke
Keisuke Kawahara
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