Title:
OPTICAL DEVICE, LITHOGRAPHY DEVICE AND MANUFACTURING METHOD OF ARTICLE
Document Type and Number:
Japanese Patent JP2015125424
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an optical device that enables reduction in a variation of a loss of light amount further than when guiding light from all of a plurality of light sources different in a wavelength by use of one fiber.SOLUTION: The present invention relates to an optical device that includes an optical system illuminating an irradiated face with light, and the optical device includes: three or more light sources 1 that emit light mutually different in a wavelength; and a plurality of fibers 7a to 7d that guides three or more light from the light sources 1 to the optical system. The plurality of fibers includes a first fiber 7d upon which two or more light of three or more light are incident, and a second fiber 7a upon which light of a wavelength other than wavelengths of two or more light is incident, and the first fiber 7d and the second fiber 7a are mutually different in a cutoff wavelength.
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Inventors:
YAMAGUCHI WATARU
INA HIDEKI
INA HIDEKI
Application Number:
JP2013272042A
Publication Date:
July 06, 2015
Filing Date:
December 27, 2013
Export Citation:
Assignee:
CANON KK
International Classes:
G02B19/00; G01B11/00; G02B7/28; G02B7/36; G02B21/06; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa