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Title:
OPTICAL DEVICE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2007078395
Kind Code:
A
Abstract:

To improve an optical device, such as an optical pressure sensor and the like in the detection accuracy and in the manufacturing efficiency.

The optical pressure sensor 1 comprises an optical waveguide 3 formed on one substrate face of a silicon substrate 2, a pressure-receiving chamber 5 formed on the other substrate face, and a diaphragm 6 formed at the bottom of the pressure-receiving chamber 5. That is to say, the optical waveguide 3, the pressure-receiving chamber 5 and the diaphragm 6 are formed integrally into a single silicon substrate. Thus, when the pressure of a fluid flowing into the pressure-receiving chamber 5 causes displacement of the diaphragm 6 in the vertical direction or the like, the displacement is transmitted to a Bragg grating 4 precisely and directly, whereby the pressure of the fluid can be detected with high accuracy and with good response.


Inventors:
Oohara, Atsushi
Takeuchi, Yukihiro
Application Number:
JP2005000263637
Publication Date:
March 29, 2007
Filing Date:
September 12, 2005
Export Citation:
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Assignee:
DENSO CORP
International Classes:
G01L11/02; G01L1/24; G01L9/00; G01D5/353
Domestic Patent References:
JP2000221085A
JP2004198116A
JP2004271756A
JP2005136385A
JP2003156643A
Attorney, Agent or Firm:
田下 明人