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Title:
OPTICAL DEVICE, AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2011099878
Kind Code:
A
Abstract:

To improve a detection accuracy and manufacture efficiency of an optical device such as an optical pressure sensor.

The optical pressure sensor 1 is equipped with: an optical waveguide 3 formed on one substrate surface of a silicon substrate 2; a pressure receiving chamber 5 formed on the other substrate surface; and a diaphragm 6 formed on a bottom part of the pressure receiving chamber 5. Namely, the optical waveguide 3, the pressure receiving chamber 5 and the diaphragm 6 are integrally formed on one silicon substrate. Hereby, when the diaphragm 6 is displaced in a vertical direction or the like by a pressure of fluid flowing into the pressure receiving chamber 5, the displacement is transferred accurately and directly to a Bragg grating 4. The pressure of the fluid is thereby detected highly accurately with excellent responsiveness.


Inventors:
OHARA JUNSHI
TAKEUCHI YUKIHIRO
Application Number:
JP2011040251A
Publication Date:
May 19, 2011
Filing Date:
February 25, 2011
Export Citation:
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Assignee:
DENSO CORP
International Classes:
G01L11/02
Domestic Patent References:
JP2000221085A2000-08-11
JP2004198116A2004-07-15
JP2005136385A2005-05-26
JP2003156643A2003-05-30
JP2004271756A2004-09-30
JP2000221085A2000-08-11
JP2004198116A2004-07-15
JP2005136385A2005-05-26
JP2003156643A2003-05-30
Attorney, Agent or Firm:
Akito Tashita