Title:
OPTICAL DEVICE, PROJECTION ALIGNER PROVIDED WITH THE SAME AND PRODUCTION OF DEVICE
Document Type and Number:
Japanese Patent JPH10206798
Kind Code:
A
Abstract:
To improve the laser durability of a laser mirror.
The device is provided with a laser beam source 1 emitting a laser beam in a specified polarization direction, and the laser mirrors LM1 to LM3 reflecting the laser beam. In the device, the laser beam made incident on the laser mirror is turned into P polarized light or elliptically polarized light with respect to the laser mirror. A phase shifter 2 is arranged on the incident side of the laser mirror so that the laser beam made incident on the laser mirror LM1 may be turned into the P polarized light or the elliptically polarized light with respect to the laser mirror LM1.
Inventors:
TANITSU OSAMU
OSHIKAWA SATORU
OSHIKAWA SATORU
Application Number:
JP629197A
Publication Date:
August 07, 1998
Filing Date:
January 17, 1997
Export Citation:
Assignee:
NIKON CORP
International Classes:
G02B17/06; G02B27/28; G03F7/20; H01L21/027; (IPC1-7): G02B27/28; G02B17/06; G03F7/20; H01L21/027