Title:
OPTICAL DEVICE, METHOD FOR DETECTING REFLECTED LIGHT AND METHOD FOR CALCULATING REFLECTANCE
Document Type and Number:
Japanese Patent JP2022053696
Kind Code:
A
Abstract:
To provide an optical device, a method for detecting the reflected light, and a method for calculating reflectance capable of easily guiding only the reflected light reflected on the surface of an object to be measured to detection means.SOLUTION: Disclosed is a reflectance measuring device 1 which irradiates an object W to be measured having light transmissivity with light to obtain information on the reflected light on the surface of the object W to be measured. This device includes: an LED device 11 for irradiating the object W to be measured with light; a mirror 13 for reflecting the reflected light reflected by the object W to be measured in the arbitrary direction by the displacement of a continuous position; and a PD unit 19 for detecting the received light. In this reflectance measuring device 1, an angle of an optical path of the reflected light is changed by rotationally displacing the mirror 13, and the reflected light reflected on the surface of the object W to be measured is guided to the PD unit 19 and made to be detected.SELECTED DRAWING: Figure 2
Inventors:
SHOJI SHUSUKE
KUMAGAI NAOYA
KUMAGAI NAOYA
Application Number:
JP2020160474A
Publication Date:
April 06, 2022
Filing Date:
September 25, 2020
Export Citation:
Assignee:
TOKAI KOGAKU KK
International Classes:
G01N21/55
Attorney, Agent or Firm:
Junichi Shibata
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