Title:
光学デバイス、レーザ装置および露光装置
Document Type and Number:
Japanese Patent JP5793308
Kind Code:
B2
Abstract:
As a spatial light modulator 35 is disposed between a wavelength conversion part 315 and an exit surface 311b in a ferroelectric crystal substrate 31, only zeroth-order light which is at a particular wavelength is guided to a substrate while laser light from the wavelength conversion part 315 is being modulated, whereby a pattern corresponding to LSI data is drawn. Further, the spatial light modulator 35 is disposed together with the wavelength conversion parts 314 and 315 inside the ferroelectric crystal substrate 31.
Inventors:
Oka Saki Masahide
Toshiaki Suhara
Toshiaki Suhara
Application Number:
JP2011006130A
Publication Date:
October 14, 2015
Filing Date:
January 14, 2011
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
G02F1/377; G02F1/035; G02F1/39; H01L21/027
Domestic Patent References:
| JP11007050A | ||||
| JP2010152214A | ||||
| JP2008147569A | ||||
| JP2002090785A | ||||
| JP9297331A | ||||
| JP5210135A |
Attorney, Agent or Firm:
Kakusho Shoichi
Ryose Uji
Kazumasa Onishi
Ryose Uji
Kazumasa Onishi
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