To realize high resolution, quick response and smaller size of chromatic confocal displacement meter.
In an optical displacement meter, a wide band light source 22 is arranged at a confocal point position on the opposite side of an object (8), relative to an objective lens 12. A spatial filter is provided at a confocal position for the reflection light returning from the object, for penetration. A measured light of the wavelength focused on the object is extracted, and the wavelength of the measured light is identified, for measuring position of the object. There are provided a polarizer 52 which splits the measured light propagated in one direction by collimation into linear polarized light in X and Y directions orthogonal to the propagation direction Z, a wavelength plate 54 which allows the two linear polarized light in two direction to pass to form oval polarized light having phase difference corresponding to optical wavelength, a polarizing separation element 56 which splits the oval polarized light into polarized components in two directions between X and Y, and light receiving elements 58A and 58B for detecting an optical volume of each polarized component. (A-B)/(A+B) is calculated using optical volume signals A and B detected with the light receiving element.
| JP2008256679A | 2008-10-23 | |||
| JP2009103573A | 2009-05-14 | |||
| JPH01113626A | 1989-05-02 | |||
| JP2000186928A | 2000-07-04 | |||
| JPH109827A | 1998-01-16 | |||
| JP2004101532A | 2004-04-02 |
Keisuke Matsuyama
Tsuyoshi Makino