Title:
OPTICAL ELEMENT HOLDING DEVICE, OPTICAL SYSTEM AND EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2015060131
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To reduce stress polarization aberration or distortion of an optical element occurring upon pressing the optical element as much as possible, and to hold the optical element with the optical element pressed by strong force capable of suppression of a position variation.SOLUTION: A lens holding device 8A holding a lens 26 includes: a division lens barrel 28 that has a level difference part supporting a peripheral edge part of the lens 26; and an annular presser ring 32 that presses the peripheral edge part of the lens 26 in between a support part of the division lens barrel 28 and the annular presser ring 32. The presser ring 32 has six elastic hinge parts 32d to 32i, and each of the elastic hinge parts 32d to 32i includes two contact parts D1 and D2 to D11 and D12 which are provided to be oscillatable respectively as to mutually different support parts C11 and C12 to C31 and C32, and capable of contacting with the peripheral edge part of the lens 26.
Inventors:
HASEGAWA YU
Application Number:
JP2013194719A
Publication Date:
March 30, 2015
Filing Date:
September 19, 2013
Export Citation:
Assignee:
NIKON CORP
International Classes:
G02B7/02; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Omori 聡