Title:
光学素子及び光学素子の製造方法
Document Type and Number:
Japanese Patent JP5098640
Kind Code:
B2
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Inventors:
Kunihiko Yoshino
Application Number:
JP2007505821A
Publication Date:
December 12, 2012
Filing Date:
January 30, 2006
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B5/28; C23C14/34
Domestic Patent References:
| JP2003114327A | 2003-04-18 | |||
| JP2001221914A | 2001-08-17 | |||
| JP2000329921A | 2000-11-30 | |||
| JP2002196284A | 2002-07-12 |
Foreign References:
| WO2004038061A1 | 2004-05-06 |
Attorney, Agent or Firm:
Patent business corporation ofh patent office