Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
OPTICAL ELEMENT AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2008076941
Kind Code:
A
Abstract:

To provide an optical element which has properties such as high hardness, humidity resistance, heat resistance and chemical stability and is provided with a protective film which can be transmitted by light of a wide wavelength region from an ultraviolet ray region to infrared ray region.

The optical element is provided with an optical element base plate 1 and a hafnium oxide HfO2 film 2 which is formed on the surface of the optical element base plate 1 by an ion beam assist deposition method and functions as the protective film for the optical element base plate 1.


Inventors:
HIRAI TAKAHIKO
KITAMURA KEIMEI
Application Number:
JP2006258629A
Publication Date:
April 03, 2008
Filing Date:
September 25, 2006
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G02B5/08; C23C14/08; G02B1/10; G02B1/14; G02B5/20
Domestic Patent References:
JPH09197456A1997-07-31
JPH07234302A1995-09-05
JP2001098373A2001-04-10
JP2003524704A2003-08-19
JP2007199378A2007-08-09
Foreign References:
WO2005020298A12005-03-03
Attorney, Agent or Firm:
Hidekazu Miyoshi
Nakamura Tomoyuki
Masakazu Ito



 
Previous Patent: CURED PATTERN AND METHOD FOR MANUFACTURING THE SAME, PHOTOMASK AND EXPOSURE DEVICE

Next Patent: FILM FIXING AND ALIGNING DEVICE FOR ALIGNMENT