Title:
リソグラフィ装置用の光学素子マウント
Document Type and Number:
Japanese Patent JP5793222
Kind Code:
B2
Abstract:
A mount configured to mount an optical element in a module for a lithographic apparatus. The mount includes a plurality of resilient members constructed and arranged to circumferentially support the optical element. Each resilient member includes a plurality of resilient subsections that are configured to engage the optical element around a perimeter thereof. Each resilient subsection is configured to flex independent of another resilient subsection.
Inventors:
Tegenbosch Henrix Geraldus
Strücken Alexander Matthews
Jacob Crane
Behrens Lute Antonius Catalina Maria
Van der haren wart
Strücken Alexander Matthews
Jacob Crane
Behrens Lute Antonius Catalina Maria
Van der haren wart
Application Number:
JP2014125644A
Publication Date:
October 14, 2015
Filing Date:
June 18, 2014
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G03F7/20; G02B7/192; G02B19/00
Domestic Patent References:
| JP2000227533A | ||||
| JP2004258273A |
Attorney, Agent or Firm:
Sakaki Morishita
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