Title:
光学装置およびレーザー加工機
Document Type and Number:
Japanese Patent JP4779195
Kind Code:
B2
Inventors:
Atsushi Katsunuma
Application Number:
JP2000302377A
Publication Date:
September 28, 2011
Filing Date:
October 02, 2000
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B5/04; G02B27/09; B23K26/06; B23K26/064; B23K26/073; G02B13/00; G02B13/14
Domestic Patent References:
| JP62013291A | ||||
| JP6122086A | ||||
| JP63121813A |
Attorney, Agent or Firm:
Fuyuki Nagai
Takao Watanabe
Takao Watanabe