Title:
OPTICAL FIBER HOMODYNE LASER INTERFEROMETER
Document Type and Number:
Japanese Patent JP2008107358
Kind Code:
A
Abstract:
To provide an optical fiber homodyne laser interferometer that has a simple constitution and can perform precise detection of a cantilever.
The optical fiber homodyne laser interferometer has a microcantilever detection optical system for positioning laser spot to a microcantilever 169.
Inventors:
KAWAKATSU HIDEKI
Application Number:
JP2007322903A
Publication Date:
May 08, 2008
Filing Date:
December 14, 2007
Export Citation:
Assignee:
JAPAN SCIENCE & TECH AGENCY
International Classes:
G01G3/16; G01B11/00; G01Q10/04; G01Q10/06; G01Q20/02; G01Q30/02; G01Q60/24; G01Q60/32; G01Q60/38; G01Q70/06
Attorney, Agent or Firm:
Mamoru Shimizu
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