Title:
基準信号を検出可能な光ファイバ干渉型格子エンコーダ
Document Type and Number:
Japanese Patent JP5693840
Kind Code:
B2
Abstract:
A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead includes "primary" fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. The readhead may include "secondary" fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers. Spatial filter masks configured for the secondary fiber optic receiver channels provide two spatially periodic secondary signals arising from interference fringes outside of the receiving area of the primary fiber optic receiver channels. The secondary signals are out of phase with one another and their spatial frequency is higher than that of the primary signals. A signal crossing of the reference mark secondary signals is identified that is spatially adjacent to a signal crossing of the reference mark primary reference signals.
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Inventors:
Abron M Twilling
Joseph Dito Biasson
Scott Hashira
Carl Gee Mallerie
Joseph Dito Biasson
Scott Hashira
Carl Gee Mallerie
Application Number:
JP2009265460A
Publication Date:
April 01, 2015
Filing Date:
November 20, 2009
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01D5/347; G01D5/38
Domestic Patent References:
JP2009031279A | ||||
JP2005283357A | ||||
JP10332431A | ||||
JP2004333470A | ||||
JP56014112A | ||||
JP9021654A | ||||
JP2005106827A | ||||
JP2007232681A |
Attorney, Agent or Firm:
Satoshi Takaya
Keisuke Matsuyama
Tsuyoshi Makino
Keisuke Matsuyama
Tsuyoshi Makino