Title:
光学フィルターデバイス、光学モジュール、及び電子機器
Document Type and Number:
Japanese Patent JP6390090
Kind Code:
B2
Abstract:
An optical filter device (500) includes a variable wavelength interference filter (501) having a pair of reflecting films (54, 55) opposed to each other, and an electrostatic actuator (56) adapted to change a gap dimension between the pair of reflecting films (54, 55), and at least one bandpass filter (502) disposed on an optical axis of the pair of reflecting films (54, 55), and the bandpass filter (502) includes a plurality of transmission wavelength bands (Rp) in which light is transmitted.
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Inventors:
Yuki Matsushita
Application Number:
JP2013238591A
Publication Date:
September 19, 2018
Filing Date:
November 19, 2013
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G02B26/00; G01J3/26; G02B5/28
Domestic Patent References:
JP2013083685A | ||||
JP2013113900A | ||||
JP2010009025A | ||||
JP2001525075A | ||||
JP2004177658A | ||||
JP7281021A | ||||
JP60066201A |
Foreign References:
US4553816 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai