Title:
OPTICAL ILLUMINATION SYSTEM AND ALIGNER
Document Type and Number:
Japanese Patent JP2005093692
Kind Code:
A
Abstract:
To provide an optical illumination system that is more uniformized in the angle distribution of mask lighting light than the conventional practice, and to provide an aligner using the system.
The optical illumination system is provided with an optical system which transforms a luminous flux from a light source into an almost parallel luminous flux. The optical system has first and second mirrors, and the first mirror has an opening through which the luminous flux reflected by the second mirror is passed.
Inventors:
TSUJI TOSHIHIKO
Application Number:
JP2003324636A
Publication Date:
April 07, 2005
Filing Date:
September 17, 2003
Export Citation:
Assignee:
CANON KK
International Classes:
G02B5/10; G02B3/00; G02B19/00; G03F7/20; G21K1/00; H01L21/027; (IPC1-7): H01L21/027; G02B3/00; G02B5/10; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio
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