PURPOSE: To eliminate an influence due to a surface defect of a substrate by a method wherein two or more photodetectors are arranged like a straight line, an insulating film, a first electrode formed on this, an active layer and a second light-transmitting electrode are provided so that the surface defect of the substrate can be eliminated by the insulating film.
CONSTITUTION: An insulating film 2 such as silicon nitride, silicon oxide or the like is formed on a glass substrate 1 ; two or more photodiodes are arranged like a straight line. The insulating film 2 functions in such a way that a defective region such as an uneven region, a defective insulation region or the like existing on the surface of the glass substrate 1 does not affect adversely the photodiodes formed on its upper part. A lower-part electrode 3 composed of chromium, an active layer 4 composed of amorphous silicon and a transparent electrode 5 are laminated on the insulating film 2; two or more photodetectors are formed. Accordingly, the defective insulation region existing on the surface of the glass substrate 1 is covered with the insulating film 2; the defective insulation region of the glass substrate 1 does not affect adversely the lower-part electrode 3, the active layer 4 and the transparent electrode 5.
MISHIMA YASUYOSHI
SOEDA SHINICHI
KUSAKAWA SUSUMU
