Title:
オプティカルインテグレータ、照明光学系、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP5182588
Kind Code:
B2
Inventors:
Norio Miyake
Application Number:
JP2009079260A
Publication Date:
April 17, 2013
Filing Date:
March 27, 2009
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B3/00; G02B3/06; G02B19/00; G03F7/20
Domestic Patent References:
| JP2006253529A | ||||
| JP2005352062A | ||||
| JP2005173506A | ||||
| JP2004055856A | ||||
| JP2002100561A | ||||
| JP2007027240A | ||||
| JP2004247527A | ||||
| JP9092598A | ||||
| JP2007299993A | ||||
| JP2008544531A | ||||
| JP2010147434A | ||||
| JP2010040617A | ||||
| JP2009260342A |
Foreign References:
| WO1999036832A1 | ||||
| WO2006070580A1 |
Attorney, Agent or Firm:
Takao Yamaguchi