OPTICAL INTERFERENCE MEASUREMENT INSTRUMENT AND PROGRAM

Japanese Patent JP2015118076

A

PROBLEM TO BE SOLVED: To provide an optical interference measurement instrument which is capable of performing adjustment for generation of interference fringes without exerting an influence on a coordinate system thereof.SOLUTION: The optical interference measurement instrument includes: a light source which outputs light: a beam splitter which splits light outputted from the light source into a reference optical path and a measurement optical path and outputs a synthetic wave resulting from synthesis of reflected light passing the reference optical path and reflected light passing a workpiece disposed in the measurement optical path; a reference mirror 231 which is disposed in the reference optical path and reflects light split into the reference optical path by the beam splitter; a stage which is disposed in the measurement optical path and has the workpiece placed thereon; imaging means which captures an image into which the synthetic wave is formed; reference mirror adjustment mechanisms (234, 238, 239) for adjusting an attitude of the reference mirror 231; and control means which controls the reference mirror adjustment mechanism on the basis of the image captured with the workpiece on the stage so that a reflecting surface of the reference mirror 231 faces a measurement surface of the workpiece.

OKABE KENJI
ZHANG YU-WU
NAGAHAMA TATSUYA

JP2013263628A

June 25, 2015

December 20, 2013

Click for automatic bibliography generation  

MITUTOYO CORP

G01B9/02; G01B11/24

JP2013036848A	2013-02-21
JP2006118944A	2006-05-11
JP2007536539A	2007-12-13
JPH02130715A	1990-05-18

US6999180B1

2006-02-14

Shigeki Orizaka

Previous Patent: COMPRESSION STRENGTH ESTIMATION METHOD BY HAMMER STRIKING

Next Patent: THIN FILM EVALUATION STRUCTURE AND THIN FILM EVALUATION METHOD